Single Ion Implanter
Publications, News and Projects
Find out about forthcoming Projects, publications and
events with nano analytic GmbH
9th National Nanotechnology Conference, Wroclaw (PL)
SPIE Advanced Lithography 2019, San Jose/CA (USA)
CNM 2017, Wroclaw (PL)
Nano-Fabrication, -Devices & -Metrology 2017, Eindhoven (NL)
JVST-B (34) 06K202 (2016)
Pattern-generation and pattern-transfer for single-digit nano devices
INRAM - Industrial AFM
Duration: 2016 - 2018. Development of a compact AFM unit for industrial applications.
Proc. SPIE. 9424 (2015)
Self-actuated, self-sensing cantilever for fast CD measurement
Duration: 2014 - 2016. Novel sensor concepts for air quality measurement.