Multi-Plattform UHV System – AFM-MPS
Single-Dopant Lithography – AFM-SDL
Publications, News and Projects
Find out about forthcoming Projects, publications and
events with nano analytic GmbH
9th National Nanotechnology Conference, Wroclaw (PL)
SPIE Advanced Lithography 2019, San Jose/CA (USA)
CNM 2017, Wroclaw (PL)
Nano-Fabrication, -Devices & -Metrology 2017, Eindhoven (NL)
JVST-B (34) 06K202 (2016)
Pattern-generation and pattern-transfer for single-digit nano devices
INRAM - Industrial AFM
Duration: 2016 - 2018. Development of a compact AFM unit for industrial applications.
Proc. SPIE. 9424 (2015)
Self-actuated, self-sensing cantilever for fast CD measurement
Duration: 2014 - 2016. Novel sensor concepts for air quality measurement.