Multi-Plattform UHV System – AFM-MPS
Single-Dopant Lithography – AFM-SDL
Publications, News and Projects
Find out about forthcoming Projects, publications and
events with nano analytic GmbH
MNE 2023 - We are there
MNE conference 2023
Workshop on Nanometrology, Wrocław, Poland, 06-07 June 2023
SPIE Advanced Lithography 2023, San Jose, CA (USA)
VI School of Vacuum Technology, Krakow, 4-5 July 2022
The MetExSPM gains attention. nano analytik GmbH is one of the consortium members.
Melbourne University publishes remarkable advances in deterministic ion implantation
Presentation of novel Nano Fabrication Device at SPIE Advanced Lithography 2021.
Invited talk about Single Atom Dopant Lithography at SPIE Advanced Lithography
SPIE Advanced Lithography 2020, San Jose, CA (USA)
SEMICON Japan 2019, Tokyo, Japan
Interview by AIP/AVS
Scientists talk about Electron Beam Induced Deposition (EBID) using active cantilever technology.
9th National Nanotechnology Conference, Wroclaw (PL)
SPIE Advanced Lithography 2019, San Jose/CA (USA)
CNM 2017, Wroclaw (PL)
Nano-Fabrication, -Devices & -Metrology 2017, Eindhoven (NL)
JVST-B (34) 06K202 (2016)
Pattern-generation and pattern-transfer for single-digit nano devices
INRAM - Industrial AFM
Duration: 2016 - 2018. Development of a compact AFM unit for industrial applications.
Proc. SPIE. 9424 (2015)
Self-actuated, self-sensing cantilever for fast CD measurement
Duration: 2014 - 2016. Novel sensor concepts for air quality measurement.