Self-actuated, self-sensing cantilever for fast CD measurement

A. Ahmad, T. Ivanov, A. Reum, E. Guliyev, T. Angelov, A. Schuh, M. Kaestner, I. Atanasov, M. Hofer, M. Holz and I.W. Rangelow

Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94240P

Presented at the SPIE Advanced Lithography Conference 2015, San Jose (CA), USA.

DOI: 10.1117/12.2085760

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