Self-actuated, self-sensing cantilever for fast CD measurementA. Ahmad, T. Ivanov, A. Reum, E. Guliyev, T. Angelov, A. Schuh, M. Kaestner, I. Atanasov, M. Hofer, M. Holz and I.W. Rangelow
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94240P
Presented at the SPIE Advanced Lithography Conference 2015, San Jose (CA), USA.