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AFMinSEM
Scanning Probe Lithography (SPL)
Single-Dopant Lithography – AFM-SDL
Multi-Plattform UHV System – AFM-MPS
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Easiest handling
Easiest probe exchange
Exceptional speed
AFMinSEM
Correlative microscopy
Correlative nanofabrication
in-situ 3D analysis
Scanning Probe Lithography (SPL)
High Resolution Lithography
Mix & Match Lithography
Step & Repeat
Multi-Plattform UHV System – AFM-MPS
Combines many tools
Flexible configuration
Surface analysis and manipulation
Single-Dopant Lithography – AFM-SDL
Ultra compact UHV-AFM with active cantilevers
Precise navigation and dopant placement
TB-EBID and FE-SPL
