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Systems

NEW! AFM-Kit

Compact design
Easy-to-use
Robust AFM

AFMinSEM

Correlative microscopy
Correlative nanofabrication
in-situ 3D analysis

Scanning Probe Lithography (SPL)

High Resolution Lithography
Mix & Match Lithography
Step & Repeat

nanoMETRONOM

Easiest handling
Easiest probe exchange
Exceptional speed

Multi-Plattform UHV System – AFM-MPS

Combines many tools
Flexible configuration
Surface analysis and manipulation

Single-Dopant Lithography – AFM-SDL

Ultra compact UHV-AFM with active cantilevers
Precise navigation and dopant placement
TB-EBID and FE-SPL
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ADDRESS & CONTACT

nano analytik GmbH
Ehrenbergstraße 3, 98693 Ilmenau

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