2023: SPIE Advanced Lithography Conference

The SPIE Advanced Lithography Conference is the leading world conference on lithography. The 2023 conference was held the week of February 27th. This symposium hosted leading researchers who are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications. The community joined to hear research, challenges, and breakthroughs.

At the conference, nanoanalytik GmbH presented its AFM tool. nano analytik had an opportunity to also present a new active probe for which the Managing Director underlined the advances over conventional probes and discussed new metrology and nanofabrication applications.