2019: SEMICON Japan
SEMICON Japan 2019 (Wednesday, December 11 - Friday, December 13, 2019) takes place (Tokyo Big Sight, Tokyo) in the heart of the semiconductor supply chain with more than 700 exhibiting companies from Japan and the world. Here, nano analytik GmbH presented in collaboration with the SEIWA Optical Ltd. and ParCan Shanghai Ltd. an innovative solution for next generation AFM inspection technology and NEW applications of the AFMinSEM tool.
To interact with industry professionals and discuss the latest developments within IC community we have shown a live operating analytical compact AFM tool from the nanoMETRONOM series based on patented active cantilever technology. Our customers could have direct “touch” with the live trench measurement and CD-metrology of IC chips.