Melbourne University reports remarkable progress in research on deterministic ion implantation

A team of scientiests led by the University of Melbourne has perfected a technique for deterministic implantation of single dopant atoms (ions) into a silicon wafer. They are put in place one by one, employing an active-cantilever-driven vacuum AFM provided by nano analytik GmbH, which is seemlessly integrated into an ion-implanter system. The deterministic single-ion implantation technology opens new horizons for building quantum computers with the same methods used in the fabrications of today's state-of-the-art microelectronic devices. The Melbourne team published several remarkable papers presenting the results achieved with this technology.

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