AFMinSEM
Ultra compact UHV-AFM for usage with active cantilevers
The AFMinSEM from the nano analytik GmbH is not only used for imaging, it is capable to be employed for nanofabrication and metrology as well.
For this purpose, we are offering a compact-AFM system, applicable in any SEM without chamber modification, for micro manipulation and metrology scanning.
The XYZ-Stage is a non-magnetic, closed-loop nanopositioner with a 60µm x 60µm x 20µm range (Position Noise: X, Y=0.4nm; Z=0.2nm) of motion and an extremely low out-of-plane motion. It features high resonant frequencies (X, Y=750Hz; Z=2000Hz) and is designed for space-constrained applications that require high-precision positioning. Furthermore, the coarse positioning stage offers manipulation capabilities in the range of 1,5 cm in X, Y and Z with a precision of 3nm.
AFM operating under room and vacuum conditions
No machine downtime of the AFM or your SEM tool, due to AFM operation capability in vacuum and air.
Fast installation in less than 5 minutes.
Specifications
| Maximum XY-Range (Resolution) | 60µm (0.4nm) |
| Maximum Z-range (Resolution) | 20µm (0.2nm) |
| Maximum XY-Addressing Field (Resolution) | 18mm x 18mm (3µm) |
| Maximum Sample Size / Height | ø 70mm / 6mm |
| Navigation Camera | Optionally available for air operation. |
| Approach Distance | Eight mm distance, fully automatic or manual step-by-step approach. |
| Imaging modes | Non-contact, Contact, Phase Shift |
| Spectroscopy Modes | Force-Distance, Amplitude-Distance |
| Optional Modes | Current-Distance, Lithography, Q-Control, MFM, EFM, KPFM |
| Size (LWH) / Weight | 108mm x 70mm x 50mm / 360g |
| Mounting | Applicable to most SEM-/FIB-systems available on the market. |
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