AFMinSEM

Ultra compact UHV-AFM for usage with active cantilevers

The AFMinSEM from the nano analytik GmbH is not only used for imaging, it is capable to be employed for nanofabrication and metrology as well.

For this purpose, we are offering a compact-AFM system, applicable in any SEM without chamber modification, for micro manipulation and metrology scanning.

The XYZ-Stage is a non-magnetic, closed-loop nanopositioner with a 60µm x 60µm x 20µm range (Position Noise: X, Y=0.4nm; Z=0.2nm) of motion and an extremely low out-of-plane motion. It features high resonant frequencies (X, Y=750Hz; Z=2000Hz) and is designed for space-constrained applications that require high-precision positioning. Furthermore, the coarse positioning stage offers manipulation capabilities in the range of 1,5 cm in X, Y and Z with a precision of 3nm.

AFM operating under room and vacuum conditions

No machine downtime of the AFM or your SEM tool, due to AFM operation capability in vacuum and air.

Fast installation in less than 5 minutes.

Specification

ParameterSystem Data
Vacuum-SuitabilityMeasurement-head is fully vacuum compatible.
Maximum XY-Range (Resolution)60µm (0,4nm)
Maximum Z-range (Resolution)20µm (0,2nm)
Maximum XY-Addressing Field (Resolution)18mm x 18mm (3µm)
Maximum Sample Size / Heightø 70mm / 6mm
Navigation CameraOptionally available for air operation.
Approach DistanceEight mm distance, fully automatic or manual step-by-step approach.
Imaging modesNon-contact, Contact, Phase Shift
Spectroscopy ModesForce-Distance, Amplitude-Distance
Optional ModesCurrent-Distance, Lithography, Q-Control, MFM, EFM, KPFM
Size (LWH) / Weight108mm x 70mm x 50mm / 360g
MountingApplicable to most SEM-/FIB-systems available on the market.

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