nano analytik AFM probes are based on cantilevers with piezo-resistive readout and “on board” thermomechanical actuator.
Field-Emission Scanning Probe Lithography FE-SPL
The exposure of electron-sensitive materials to low-energy electrons emitted from an ultra-sharp active-cantilever tip in close proximity to a resist-covered specimen.
Tip-Based Electron Beam Induced Deposition TB-EBID
Uses low energy electrons emitted from the tip of an active cantilever to induce deposition of molecules on a substrate.