2021: Nano Fabrication Machine 100 at SPIE Advanced Lithography

At the recent SPIE Advanced Lithography Conference 2021, the Ilmenau University of Technology presented a system manufactured by the SIOS Meßtechnik GmbH in cooperation with IMMS and nano analytik GmbH. The system, called the Nano Fabrication Machine 100 (NFM-100), incorporates both an AFM and field-emission-scanning-probe-lithography (FE-SPL) in the same unit. For more information visit https://semiengineering.com/manufacturing-bits-march-2/ or see Proceedings SPIE 11610, Novel Patterning Technologies 2021, 1161016 (22 February 2021), doi: 10.1117/12.2583703.

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