Pattern-generation and pattern-transfer for single-digit nano devices

I. W. Rangelow, A. Ahmad, T. Ivanov, M. Kaestner, Y. Krivoshapkina, T. Angelov, S. Lenk, C. Lenk, V. Ishchuk, M. Hofmann, D. Nechepurenko, I. Atanasov, B. Volland, E. Guliyev, Z. Durrani, M. Jones, C. Wang, D. Liu, A. Reum, M. Holz, N. Nikolov, W. Majstrzyk, T. Gotszalk, D. Staaks, S. Dallorto and D. L. Olynick

Journal of Vacuum Science and Technology and Microelectronics 34 (6)

Presented at the 62nd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN) 2018, Pittsburgh (PA), USA.

DOI: 10.1116/1.4966556

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