AFMinSEM by nano analytik GmbH allows metrology under vacuum conditions. For example together with SEM, hence enabling correlative measurement of those two technologies.

With the system, measurement in contact and non-contact mode is possible.

The following pictures show examples of metrology in contact mode.

The next picture shows an example for metrology in non-contact mode.

The big advantage of SPL is the capability to switch into AFM mode, characterizing the surface before and after the lithographic step.

Measurement of HOPG.

Measurement of Celgard ® oriented Polypropylene membrane exhibiting precise AFM force control.
(Noncontact Mode, Small Omega Active Cantilever (SMAC)).

Measurment of SrTiO3

111 Silicon Steps