Tip-based electron beam induced deposition using active cantilevers

Mathias Holz, Frances I. Allen, Christoph Reuter, Ahmad Ahmad, Martin Hofmann, Alexander Reum, Tzvetan Ivanov, and Ivo W. Rangelow

Journal of Vacuum Science & Technology B 37, 061812 (2019)

 

DOI: 10.1116/1.5123287

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