Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography

T. Angelov, A. Ahmad, E. Guliyev, A. Reum, I. Atanasov, Tzv. Ivanov, V. Ishchuk, M. Kästner, Y. Krivoshapkina, St. Lenk, C. Lenk, I.W. Rangelow, M. Holz and N. Nikolov

Journal of Vacuum Science & Technology B34, 06KB01 (2016)

Presented at the 60th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN) 2016, Pittsburgh (PA), USA.

DOI: 10.1116/1.4964290