Sharp GaN nanowires used as field emitter on active cantilevers for scanning probe lithography

C. Lenk, M. Hofmann, T. Ivanov, A. Ahmad, S. Lenk, I.W. Rangelow, A. Reum, C. Reuter, M. Holz, M. Behzadirad, A.K. Rishinaramangalam, D. Feezell and T. Busani

Journal of Vacuum Science and Technology B 36, 06JL04 (2018)

Presented at the 62nd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN) 2018, Puerto Rico (USA).

DOI: 10.1116/1.5048190