Scanning probes in nanostructure fabrication

Marcus Kaestner, Tzvetan Ivanov, Andreas Schuh, Ahmad Ahmad, Tihomir Angelov, Yana Krivoshapkina, Matthias Budden, Manuel Hofer, Steve Lenk, Jens-Peter Zoellner, Ivo W. Rangelow, Alexander Reum, Elshad Guliyev, Mathias Holz, and Nikolay Nikolov

Journal of Vacuum Science & Technology B 32, 06F101 (2014)

Journal of Vacuum Science & Technology B

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