Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication

I.W. Rangelow, T. Ivanov, A. Ahmad, M. Kästner, C. Lenk, I.S. Bozchalooi, F. Xia, K. Youcef-Toumi, M. Holz and A. Reum

Journal of Vacuum Science and Technology B (35), 06G101 (2017)

DOI: 10.1116/1.4992073

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