Parallel active cantilever AFM tool for high-throughput inspection and metrologyM. Holz, C. Reuter, A. Ahmad, A. Reum, T. Ivanov, E. Guliyev, I.W. Rangelow and H.-S. Lee
SPIE Proceedings Volume 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII; 1095929 (2019)
Presented at the SPIE Advanced Lithography Conference 2019, San Jose (CA), USA.