Parallel active cantilever AFM tool for high-throughput inspection and metrology

M. Holz, C. Reuter, A. Ahmad, A. Reum, T. Ivanov, E. Guliyev, I.W. Rangelow and H.-S. Lee

SPIE Proceedings Volume 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII; 1095929 (2019)

Presented at the SPIE Advanced Lithography Conference 2019, San Jose (CA), USA.

DOI: 10.1117/12.2515091