Nanoscale lift-off process using field emission scanning probe lithography

Martin Hofmann, Stephan Mecholdt, Markus Mohr, Mathias Holz, Stefano Dallorto, Eberhard Manske, Hans-Jörg, Fecht, and Ivo W. Rangelow

Journal of Vacuum Science & Technology B 37, 061803 (2019)