Nanoscale lift-off process using field emission scanning probe lithography

Martin Hofmann, Stephan Mecholdt, Markus Mohr, Mathias Holz, Stefano Dallorto, Eberhard Manske, Hans-Jörg, Fecht, and Ivo W. Rangelow

Journal of Vacuum Science & Technology B 37, 061803 (2019)

DOI: 10.1116/1.5122272

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