Line Edge Roughness Metrology Software

Sertac Guneri, Yazgi, Tzvetan Ivanov, Mathias Holz, Ivo W. Rangelow, B. Erdem Alaca

Journal of Vacuum Science & Technology B 38 (1) (2020)

DOI: 10.1116/1.5122675

Any questions? Write us about it!

Salutation*

First Name*

Last Name*

E-Mail*

Phone number*

Company Name

Country

Message*

Attachment

Upload a file

Personal information provided will be used in accordance with our Privacy Policy.