Large area fast-AFM scanning with active "Quattro" cantilever arrays

A.Ahmad. N. Nikolov, T. Angelov, Tzv. Ivanov, A. Reum, I. Atanasov, E. Guliyev, V. Ishchuk, M. Kästner, St. Lenk, C. Lenk, I.W. Rangelow and M. Holz

Journal of Vacuum Science & Technology B34, 06KM03 (2016)