Tip-based nano-manufacturing and -metrology

Teodor Gotszalk, Grzegorz Jóźwiak, Jacek Radojewski, Thomas Fröhlich, Roland Füssl, Eberhard Manske, Mathias Holz, Tzvetan Ivanov, Ahmad Ahmad and Ivo W. Rangelow

Journal of Vacuum Science & Technology B 37, 030803 (2019)

DOI: 10.1116/1.5083044