Tip-based nano-manufacturing and -metrology

Teodor Gotszalk, Grzegorz Jóźwiak, Jacek Radojewski, Thomas Fröhlich, Roland Füssl, Eberhard Manske, Mathias Holz, Tzvetan Ivanov, Ahmad Ahmad and Ivo W. Rangelow

Journal of Vacuum Science & Technology B 37, 030803 (2019)

DOI: 10.1116/1.5083044

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Tip-based nano-manufacturing and -metrology

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AFMinSEM

Scanning Probe Lithography (SPL)

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Multi-Plattform UHV System – AFM-MPS

Single-Dopant Lithography – AFM-SDL

Attoscale Mass Detection

AFM Cantilever

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