Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions

I.W. Rangelow, C. Lenk, M. Hofmann, S. Lenk, T. Ivanov, A. Ahmad, M. Kaestner, E. Guliyev, C. Reuter, M. Budden, J.-P. Zöllner, M. Holz, A. Reum, Z. Durrani, M. Jones, C. Aydogan, M. Bicer, B.E. Alaca, M. Kuehnel, T. Fröhlich, R. Fuessl and E. Manske

SPIE Proceedings Volume 10584, Novel Patterning Technologies 2018; 1058406 (2018)

Presented at the SPIE Advanced Lithography Conference 2018, San Jose (CA), USA.

DOI: 10.1117/12.2299955

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