Field emission scanning probe lithography with GaN nanowires on active cantilevers

Mahmoud Behzadirad,Ashwin K. Rishinaramangalam,Daniel Feezell,Tito Busani,Christoph Reuter,Alexander Reum,Mathias Holz,Teodor Gotszalk,Stephan Mecholdt,Martin Hofmann,Ahmad Ahmad,Tzvetan Ivanov and Ivo W. Rangelow

Journal of Vacuum Science & Technology B 38 032806 (2020)

doi: 10.1116/1.5137901