Field-emission scanning probe lithography tool for 150 mm wafer

M. Holz, E. Guliyev, A. Ahmad, T. Ivanov, A. Reum, M. Hofmann, C. Lenk, M. Kaestner, C. Reuter, S. Lenk, I.W. Rangelow and N. Nikolov

Journal of Vacuum Science & Technology B 36, 06JL06 (2018)

Presented at the 62nd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN) 2018, Puerto Rico (USA).

DOI: 10.1116/1.5048357