Field emission from diamond nanotips for scanning probe lithography

M. Hofmann, C. Lenk, T. Ivanov, I.W. Rangelow, A. Reum, A. Ahmad, M. Holz, and E. Manske

Journal of Vacuum Science and Technology B (36), 06JL02 (2018)

Presented at the 62nd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN) 2018, Puerto Rico (USA).

DOI: 10.1116/1.5048193