Fast atomic force microscopy with self-transduced, self-sensing cantilever

A. Ahmad, T. Ivanov, T. Angelov and I.W. Rangelow

Journal of Micro/Nanolithography, MEMS, and MOEMS, 14(3), 031209 (2015).

DOI: 10.1117/1.JMM.14.3.031209

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