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Cu(OH)2 and CuO Nanorod Synthesis on Piezoresistive Cantilevers for the Selective Detection of Nitrogen Dioxide
L. Schlur, M. Hofer, A. Ahmad, K. Bonnot, M. Holz and D. Spitzer
Sensors 2018, 18(4), 1108
DOI: 10.3390/s18041108
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nanoMETRONOM
Easiest handling
Easiest probe exchange
Exceptional speed
AFMinSEM
Correlative microscopy
Correlative nanofabrication
in-situ 3D analysis
Scanning Probe Lithography (SPL)
High Resolution Lithography
Mix & Match Lithography
Step & Repeat
Multi-Plattform UHV System – AFM-MPS
Combines many tools
Flexible configuration
Surface analysis and manipulation
Single-Dopant Lithography – AFM-SDL
Ultra compact UHV-AFM with active cantilevers
Precise navigation and dopant placement
TB-EBID and FE-SPL
AFM Cantilever
Piezoresistive readout
Self-actuated
"Plug & Play" cantilever
