Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy

I.W. Rangelow, M. Kaestner, T. Ivanov, A. Ahmad, S. Lenk, C. Lenk, E. Guliyev, A. Reum, M. Hofmann, C. Reuter and M. Holz

Journal of Vacuum Science and Technology B 36, 06J102 (2018)

Presented at the 62nd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN) 2018, Puerto Rico (USA).

DOI: 10.1116/1.5048524