Applications of Tactile Microprobes for Surface Metrology

C. Reuter, M. Holz, A. Reum - nano analytik GmbH, Ilmenau (Germany),
M. Fahrbach, E. Peiner - Technische Universität Braunschweig, Braunschweig (Germany),
U. Brand - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany),
M. Hofmann, I. Rangelow - Technische Universität Ilmenau, Ilmenau (Germany)

Sensor and Measurement Science International (SMSI) 2020 - Sensors and Instrumentation, P. 87-88, June 2020

DOI 10.5162/SMSI2020/A6.2


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