Advanced electric-field scanning probe lithography on molecular resist using active cantilever

M. Kaestner, C. Aydogan, H.-S. Lipowicz, T. Ivanov, S. Lenk, A. Ahmad, T. Angelov, A. Reum, V. Ishchuk, I. Atanasov, Y. Krivoshapkina, M. Hofer, M. Holz and Ivo W.Rangelow

Journal of Micro/Nanolithography, MEMS, and MOEMS, 14(3), 031202 (2015).

DOI: 10.1117/1.JMM.14.3.031202

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