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nanoMETRONOM

Easiest handling
Easiest probe exchange
Exceptional speed

AFMinSEM

Correlative microscopy
Correlative nanofabrication
in-situ 3D analysis

Scanning Probe Lithography (SPL)

High Resolution Lithography
Mix & Match Lithography
Step & Repeat

Multi-Plattform UHV System – AFM-MPS

Combines many tools
Flexible configuration
Surface analysis and manipulation

Single-Dopant Lithography – AFM-SDL

Ultra compact UHV-AFM with active cantilevers
Precise navigation and dopant placement
TB-EBID and FE-SPL

Attoscale Mass Detection

Exceptional Sensitivity
Vacuum Compability
Calibration of EBID and EBIE

AFM Cantilever

Piezoresistive readout
Self-actuated
"Plug & Play" cantilever

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nano analytik GmbH
Ehrenbergstraße 3, 98693 Ilmenau

Mail: info@nanoanalytik.net
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